Photomask Handling Tools
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PHOTOMASK HANDLING TOOLS
- No contamination from hands and gloves
- Eliminates cleaning
- Yield improvement
- For square and rectangular mask/reticle/pellicle
- General application: mask boxes, stepper cassettes, maskcleaning machines, maskprocessors, pellicle mounting, mask inspection, aligners etc.
- Tool can be supplied in different configurations
- Hands-off handling of masks, reticles and pellicles